Applied Physics Letters
Atomic force microscope local oxidation nanolithography of graphene
Applied Physics Letters · 93, 093107 (2008)
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Introduction
An atomic-force microscope locally oxidizes graphene to draw insulating trenches, defining a roughly 25 nm ribbon and a submicrometre ring. Changing the writing conditions produces raised features instead of trenches.
A closer reading
Topography and electrical isolation matter separately to device fabrication. A raised feature cannot simply be assumed to be an insulating boundary. The proposed partial oxidation of the bumps helps explain why one writing tool can modify graphene in two different ways.